Nanoparticle Engineering for Chemical-Mechanical Planarization_ Fabrication of Next-Generation Nanodevices
/ Ungyu Paik, Jea-Gun Park
Nanoparticle Engineering for Chemical-Mechanical Planarization_ Fabrication of Next-Generation Nanodevices
Author
/ Ungyu Paik, Jea-Gun ParkPublisher
CRC PressEdition 1
978-1-4200-5911-3
list
شناسنامه
Title and Author
Nanoparticle Engineering for Chemical-Mechanical Planarization_ Fabrication of Next-Generation Nanodevices / / Ungyu Paik, Jea-Gun ParkPublication Details
: CRC Press، 2009مSubject
ChemistryAdded Identifiers
نویسنده.
Language
انگلیسیCataloger
کانورتور