Single chamber processing

Name: Single chamber processing
Author: / edited by Yves I. Nissim, Avishay Katz

Author

/ edited by Yves I. Nissim, Avishay Katz

Edition 1

0-444-89915-4

list

شناسنامه

Title and Author

Single chamber processing / / edited by Yves I. Nissim, Avishay Katz

Publication Details

آمستردام : : North - Holland، 1993م

Physical Description

x, 162 p.؛ ; 28 cm؛ : ill, diagrs..

Subject

Semiconductors
Design and Construction
Vacuum technology
Congresses

series

(European Materials Research Society Symposia proceedings؛ ; v. 37)

Added Identifiers

Nissim, Yves I, 1953-، نویسنده .
Katz, Avishay، نویسنده .

Language

انگلیسی

Retrieval Number

Congress:

انگليسي.

Includes bibliographical references.