
/ editors Jeffrey C. Gelpey - - [et al.]
Author
/ editors Jeffrey C. Gelpey - - [et al.]Edition 1
1-55899-118-2
Title and Author
Rapid thermal and integrated processing / / editors Jeffrey C. Gelpey - - [et al.]Publication Details
پیتسبرگ : : Materials Research Society، 1991مPhysical Description
xv, 504 p.؛ ; 23 cm؛ : ill..Subject
Semiconductorsseries
(Materials Research Society Symposium proceedings, v. 224؛ )Added Identifiers
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