Microlithography
/ David J. Elliott
Edition 1
list
شناسنامه
Main Entry
Elliott, David J، نویسندهTitle and Author
Microlithography / / David J. ElliottPublication Details
نیویورک : : McGraw - Hill Book Company، 1989مPhysical Description
xix, 378 p.؛ ; 22 cm؛ : illus, fig..Subject
Integrated CircuitsVery large scale integration
Design and construction
Microlithography
Photoresists
Language
انگلیسیRetrieval Number
Congress:
انگليسي.
Includes index.
Includes index.
